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Figure 10. Process adjustments for correcting thickness variations in the front half of the horizontal reactor. [17a]Chapter 2: Silicon Epitaxy by Chemical Vapor Deposition 63 6.2 Cylinder Reactor Corrective action for the cylinder reactor is presented in Fig. 12. In this reactor configuration, thickness is increased in the front (top o f carrier) by increasing the temperature and/or concentration of reactant. Thickness is increased in the back (bottom of carrier) by increasing the total flow rate, directing the gas jets in a more downward direction, and bringing the back pressure toward a more positive value. Thickness within a wafer from left to right is improved by balancing the two jet flows, by lowering the temperature to make the overall reaction become more surface reaction rate controlled and less dependent upon rate of arrival, and by increasing the distance between the flat wafer surface and the curved bell jar. Reducing the process pressure can cause the process gas to heat more slowly, and thereby, decrease the thickness in front and increase the thickness at the back. Thickness variation at any distance along the carrier is averaged by rotation. [l7b] Figure 11. Process adjustments for correcting thickness variations in the back h alf of the horizontal reactor. [17a]64 Thin-Film Deposition Processes and Technologies 6.3 Vertical Reactor Vertical epitaxy reactor behavior is depicted in Fig. 13. Thickness variation at any radius is averaged by rotation of the susceptor. The radial variation is a function of total flow rate and tends to have an optimum value of flow rate for a particular reactor configuration. For low total flow rates, the thickness tends to be thin to the outside, and for high total flow rates, the thickness tends to be thick toward the outside. [17c] Assuming that the total flow rate is approximately optimum for a particular vertical reactor configuration, Fig. 14 analyzes further effects on thickness uniformity in a vertical reactor. To correct thick on the outside and thin on the inside, one must reduce the reaction rate on the outside by lowering the total flow rate, decreasing the concentration of reactants, and/ or lowering the temperature. To correct the opposite situation, one must make the opposite changes. When optimized, the vertical reactor should be thin on the inside and outside, and thickness uniformities of ±1 3% are possible. [33] Figure 12. Process adjustments for correcting thickness variations in the cylind er reactor. [17b]Chapter 2: Silicon Epitaxy by Chemical Vapor Deposition 65 Being thick on the inside and outside at the same time is uncommon with a vertical reactor because that profile requires the reaction rate to be too high at the inside and outside of the carrier at the same time. Such a radical thickness profile is normally an indication of not having a f lat temperature profile. Depending upon the total flow rate, temperature, and reactant concentration, the temperature can be too high on either the inside or outside of the wafer carrier to achieve this thickness profile. Figure 14. Process adjustments for correcting thickness variations in the vertic al. [18] Figure 13. Effect of total flow rate on thickness variation in the vertical reac tor. [18]66 Thin-Film Deposition Processes and Technologies 6.4 Control of Variables The operator variables of flow rate, gas composition, temperature, temperature profile, and reactant chemistry are primary control items for any reactor geometry. Table 3 lists the primary control items for reactor design variables and notes the importance of each for the three different commercial reactor geometries.

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